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Wafer Handling Robot
Wafer Handling Robot
Wafer Handling Robot
Single arm,double arm structure
Absolute servo motors
Compatible with 2~12 inch wafers
Flip-Axis Wafer Robot
Flip-Axis Wafer Robot
Flip-Axis Wafer Robot
Single arm,double arm structure
Absolute servo motors
Compatible with 2~12 inch wafers
Walking Axis Wafer Robots
Walking Axis Wafer Robots
Walking Axis Wafer Robots
Linear motor structure
Walking shafts up to 6 metres long
EFEM Robot
EFEM Robot
EFEM Robot
Simultaneous finger pick and place
Absolute servo motors
Multi-functional swing-away arm
Large arm span supports 4 loadports
Wafer Finder
Wafer Finder
Wafer Finder
CCD visual structure
Linear motor applications
Front End Module of Wafer Device
Front End Module of Wafer Device
Front End Module of Wafer Device
Fully automated handling systems
Developed for 200mm wafers
Vacuum pick and place wafers
Customisable
Wafer Detection Platform
Wafer Detection Platform
Wafer Detection Platform
Linear motor and DD motor structure
High precision, high speed
Marble base
Suitable for 2-12" wafers
Semiconductor Specific DD Motor
Semiconductor Specific DD Motor
Semiconductor Specific DD Motor
High speed and high response
Water-cooled construction
High stiffness

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Gluing And Developing
Gluing And Developing
Gluing And Developing
Gluing And Developing
Grinding And Thinning
Grinding And Thinning
Grinding And Thinning
Clear Coating
Clear Coating
Clear Coating
High Temperature Furnace Tube
High Temperature Furnace Tube
High Temperature Furnace Tube
Bonding Etching
Bonding Etching
Bonding Etching
Testing Equipment
Testing Equipment
Testing Equipment

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