Application of SR8241-3101 Robot in Cleaning Coating Equipment Process
Industry
SR8241-3101 Robot in cleaning and coating equipment process applications
Device Name
SR8241-3101 robot
Industry Application
High-speed handling of semiconductor wafers in atmospheric environments for cleaning, coating, grinding, etching and other semiconductor equipment, EFEM modules, testing equipment, etc.等
Program Features
Large lifting range design,
Independent dual drive system enables simultaneous pick and place of 2 tablets,
Compact construction and small footprint,
Supports vacuum and gripper pick and place,
Multi-functional and rotatable arm,
3-section ARM without travelling axes, corresponding to 4 Loadport parallel arrangement.
