Gluing And Developing
Gluing And Developing
Grinding And Thinning
Grinding And Thinning
Clear Coating
Clear Coating
High Temperature Furnace Tube
High Temperature Furnace Tube
Bonding Etching
Bonding Etching
Testing Equipment
Testing Equipment
Application of SR8241-3101 Robot in Cleaning Coating Equipment Process
Application of SR8241-3101 Robot in Cleaning Coating Equipment Process
Application of dual arm wafer robot in cleaning and coating equipment process
Application of dual arm wafer robot in cleaning and coating equipment process
Application of DDA91 Rubber Mixing Motor in Cleaning Equipment Process
Application of DDA91 Rubber Mixing Motor in Cleaning Equipment Process

Application of SR8241-3101 Robot in Cleaning Coating Equipment Process

Industry
SR8241-3101 Robot in cleaning and coating equipment process applications
Device Name
SR8241-3101 robot
Industry Application
High-speed handling of semiconductor wafers in atmospheric environments for cleaning, coating, grinding, etching and other semiconductor equipment, EFEM modules, testing equipment, etc.等
Program Features
Large lifting range design, Independent dual drive system enables simultaneous pick and place of 2 tablets, Compact construction and small footprint, Supports vacuum and gripper pick and place, Multi-functional and rotatable arm, 3-section ARM without travelling axes, corresponding to 4 Loadport parallel arrangement.

Plan details

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