Application of wafer linear motor platform in inspection equipment process
Industry
Wafer Linear Motor Stages in Inspection Equipment Process Applications
Device Name
Wafer Linear Motor Stages
Industry Application
Wafer Linear Motor Stages in Inspection Equipment Process Applications
Program Features
Linear motor, DD motor structure
Marble mounting base
High speed, high response
Suitable for 2-12 inch wafer inspection
Wafer linear motor platform for semiconductor industry applications: wafer inspection, scribing, cutting, sorting, welding, packaging bonding and other processes.
