Using a servo motor as the flipping axis
The flipping axis can adjust the speed according to requirements
Servo motor absolute value encoder
Can achieve vacuum adsorption, clamping, and Bernoulli flipping;
Flexible structure, capable of flipping both single and double arms
The suitable wafer manufacturing processes for flip axis wafer robots include: wafer coating, film application, laser marking, cleaning, grinding, debonding, development, etching, etc
