The walking axis adopts a linear motor structure

Realize high-speed, high-precision, and low noise operation

The running axis can support pulse and EtherCAT communication;

Customizable running axis of any length, up to 6m;

The structure can be flexibly designed to meet the requirements of different working conditions

Support horizontal or side mounted installation;

The R8220 series wafer machine is suitable for high-speed handling of semiconductor wafers in atmospheric environments, suitable for various semiconductor equipment, EFEM, sorter, adhesive development equipment, cleaning equipment, testing equipment, etc