This series is a three-axis wafer edge finder, driven by a linear motor, achieving the advantages of high speed, high precision, high rigidity, and high efficiency;

Equipped with a high-resolution camera, the center of the circle is fitted to calculate the center of the wafer, achieving rapid calibration and position correction;

The cleanliness level of the product is ISOClass1, and its application scope includes industries such as semiconductors and optoelectronics;

It can complete wafer alignment, calibration, wafer center and angle correction actions within 2.5 seconds, and the repeated positioning accuracy can reach ± 0.025mm.