Wafer Linear Motor Platform

Wafer Linear Motor Platform

LXYR400x350
 

Linear motor and DD motor structure

Marble installation base

High speed and high response

Suitable for wafer detection of 2-12 inches

Application of wafer linear motor platform in the semiconductor industry: wafer detection, marking, cutting, sorting, welding, packaging and bonding processes

Online Consultation
400-019-0100
Service Hotline
Technical Parameter
Dimensional Structure
Data Catalog
CAD Drawings
Instructions
ProjectSpecification
Rated Load
15kg
Maximum Speed
1m/s
Maximum aAcceleration
1G
X-axis Travel
 400mm
Travel Y-axis
350mm
XY Axis Repetition Accuracy
± 0.5um
R-axis Repetition Accuracy
± 2.5arc sec
Positioning Accuracy After XY Axis Compensation
± 2um
Positioning Accuracy After R-axis Compensation
± 15Arc. sec
Smart Win Drive
AKS-0062AAPDB



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