The use of 2ARM construction has increased the range of transportation
Realize high-speed transmission of wafers and dual chip simultaneous retrieval and placement
Ensuring ultra-high straight-line accuracy
Various combinations of ARM and Z-axis can meet the needs of corresponding devices
Can be used for wafer transport of 2-12 inches at the same time
The SR8220 series wafer robots are used for high-speed handling of semiconductor wafers in atmospheric environments, suitable for various semiconductor equipment, EFEM, sorter, adhesive development equipment, cleaning equipment, testing equipment, etc
